Simulating Vacuum Systems using COMSOL Multiphysics
- Introduction and Agenda (0:00)
- Rarefied Flows (04:52)
- Molecular Flow: The Angular Coefficient Method (10:49)
- Molecular Flow: Modeling (17:11)
- Demo (22:22)
- Simulating Other Types of Flow (44:41)
- Q&A Session (49:58)
- How to Try COMSOL Multiphysics (57:30)
By modeling vacuum systems using COMSOL Multiphysics you can improve product performance and time to market. The insight you gain from simulations can help reduce prototyping and design costs. COMSOL is able to simulate gas flows that occur in transitional flow, slip flow, and molecular flow regimes.
This archived webinar is an introduction to the Molecular Flow interface in the COMSOL environment and shows you how to use it for analyzing multiphysics phenomena. It includes a discussion of the angular coefficient method, the modeling process, and a demonstration of setting up and solving a model of gas flow in an ion implant vacuum system.
Language Availability : english