R. Karthick, S. P. K. Babu, A. R. Abirami, and S. Kalainila
Periyar Maniammai University
This paper presents the design and simulation of high sensitivity and fast response capacitive humidity sensor. Generally, the capacitive humidity sensor is made up of parallel electrode, the upper electrode being a grid with various line width and line spacing. A model is simulated using COMSOL Multiphysics. High sensitivity and fast response of the model is optimized by varying the ...
P. Priya , B. D. Pant ,
 Birla Institute of Technology and Science Pilani, Pilani, Rajasthan, India
 CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan, India
In this paper, a free membrane is used as a receiver to increase the capacitance and therefore the resolution of the flow meter. For the current application, from the wavelength of sound wave in soft tissue (c= 1540 m/s) the resolution was calculated to be 0.48 mm. This gives the first Eigen frequency of the capacitive structure according to which the poly silicon membrane was designed. After ...
Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications
A. Arevalo, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia
The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...
A. Arevalo , D. Castro , D. Conchouso , I. G. Foulds 
 Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Saudi Arabia
 The University of British Columbia, School of Engineering, Okanagan Campus, Saudi Arabia
For our simulation we used the Piezoelectric Devices interface. The structure was set with (clamped) fix constraint boundaries to both ends. The bottom electrode was set to be the ground for the electrostatic physics and the top electrode was set to be a Terminal with potential of 10V. A parametric sweep study was set to change the geometry, the parameters to change was the hole diameter (Holed) ...
Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. The model is applied in two regimes of the process – pore formation and electropolishing – by definition of current density dependent functions of porosity and dissolution valence based on experimental results. As found also experimentally, ...
S. Kundu , H. B. Nemade ,
 Indian Institute of Technology Guwahati, Guwahati, Assam, India
The paper presents simulations of uniform thickness and thickness-tapered types of piezoelectric vibration energy harvesters using COMSOL Multiphysics software. The simulated vibration energy harvesters have bimorph cantilever structure with end mass. Tapering the thickness of the piezoelectric layer in bimorph towards the free end is found to improve the stress distribution in the beam and ...
A. Arevalo , D. Conchouso , D. Castro , M. Diaz , I. G. Foulds ,
 CEMSE Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 University of British Columbia, Vancouver, BC, Canada
INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the performance of a range of MEMS devices by decreasing any unwanted coupling effects or parasitic losses from the ...
T. Kaya, B. Shiari, K. Petsch, and D. Yates
Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI
In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...
T.Madhuranath, R.Praharsha, Dr.K.Srinivasa Rao
Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
MEMS is the leading technology which combines both electronic and mechanical devices on a single microchip. Tracing the position of the object is an important problem in engineering. This can be addressed by Gyroscopes. These sensors are used to find orientation and angular velocity. This paper focuses on 3D MEMS Piezoelectric Gyroscope. COMSOL Multiphysics® is used for designing and ...
M. Kaushik , S. Katti , V. Saradesai , P. Naragund , P. Vidhyashree , A. K. V. Nandi 
 B.V. Bhoomaraddi College of Engineering and Technology, Hubli, India
This article describes the design of MEMS based cantilever structure intended for determination of blood group and it is compared with manual method. Cantilever structure design has a sensing layer and when a blood sample comes in contact with this, results in coagulation. The surface tension in turn occurs due to chemical and biological reactions of antigen and antibodies resulting in ...