Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics
M. Guvench, and J. Crosby
University of Southern Maine, Gorham, Maine, USA
In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...
M. Itomlenskis, P. Fodor, and M. Kaufman
Physics Department, Cleveland State University, Cleveland, OH, USA
Relief patterning of the surface of microchannels has been actively pursued as a method of promoting mixing in systems with a low Reynold’s number (<<100). In this work, we explore, by using the COMSOL Multiphysics package and its Chemical Engineering Module, the possibility of enhancing the mixing quality of two fluids in a microchannel with a non-periodic fractal pattern of ridges ...
University of Applied Sciences, Regensburg, Germany
This paper gives an overview of modelling microsensors on geometry and system level. The focus will be on the generation of the multiphysics reduced order system model and the coupling with package and ASIC models. The method is based on modal superposition. This means all the details of the sensor can be considered in a finite element model. The mechanical mode shapes of this model form the ...
J. Hrdlicka, P. Cervenka, M. Pribyl, and D. Snita
Department of Chemical Engineering, Institute of Chemical Technology Prague, Prague, Czech Republic
In this paper we present results of the mathematical modeling of AC electroosmotic micropumps. Unlike others we use the full dynamic description, instead of the linearized model. Skewed hybrid discretization meshes are employed in order to accurately capture the main features of the studied system. Also, we introduce zig-zag electrode arrangements for traveling-wave electroosmotic micropumps. ...
Viscous damping of a periodic perforated MEMS microstructure when the Reynolds’ equation cannot be applied: Numerical simulations
D. Homentcovschi, and R.N. Miles
Department of Mechanical Engineering, SUNY Binghamton, NY
This paper develops a computational model for determining the total damping coefficient for a unit cell of a MEMS microscale device containing a repetitive pattern of holes. The basic cell of the microstructure is approximated by an axi-symmetric domain and the velocity and pressure fields are determined from solutions of the Navier-Stokes equations using the finite element software package ...
S. Nelson, and M. Guvench
University of Southern Maine, Gorham, Maine, USA
COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane rotational resonating MEMS sensor. The resonating sensor disk is driven by thermal expansion and contraction of the support tethers due to AC joule heating. The resonant frequency is sensed by stationary contacts. For cost reduction, the relatively simple, low cost SOIMUMPS fabrication process is ...
A. Beerwinkle, R. Singh, and G. Kirikera
Mechanics of Advanced Materials Laboratory, School of Mechanical and Aerospace Engineering, Oklahoma State University, Tulsa, OK
Geophysical Research Company, LLC, (GRC) Tulsa, OK
A three-dimensional finite element model, based on the linear field equations for superimposed small vibrations onto nonlinear thermoelastic stressed media given by Lee and Yong, was developed. This method involves solving the thermal stress and piezoelectric model with geometric and material nonlinearities. The thickness-shear mode frequency response of the model was benchmarked to ...
W. J. Wu
NTU Nano-Bio MEMS Group
National Taiwan University,
This presentation presented the following: * The building of an FEA model of an electric cell actuator using COMSOL Multiphysics * Validation of this model through the AVID and ESPI measurement systems * The building of an FEA model of an electric loudspeaker using COMSOL Multiphysics * Validation of this model throughan acoustic measurement systems This paper is in Chinese.
Numerical and Experimental Evaluation for Measurement of a Single Red Blood Cell Deformability Using a Microchannel and Electric Sensors
Kyoto University, Kyoto City, Kyoto, Japan
An electric micro-resistance sensor that can continuously measure the deformability of a single red blood cell (RBC) in a microchannel and a numerical model that can simulate the resistance and capacitance of the cell membrane and cytoplasm are developed and improved. The resistance signal pattern between the electrodes is measured to evaluate the feasibility of the present sensor, using the ...
Modeling of Silicon Piezoresistive Pressure Sensor: Application to Prevent Some Diabetes Complications
F. Kerrour, A. Beddiaf, M. Benabbas-Marir
MODerNa Laboratory, University Mentouri, Constantine, Algeria
Several analytical solutions describing the mechanical behavior of a silicon micro membrane deflection, perfectly embedded and subjected to a uniform and constant pressure have been proposed. The obtained results are compared with those obtained by using COMSOL software for a rectangular diaphragm deflection. COMSOL Multiphysics is powerful software for solving problems based on partial ...