J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
The motion of a resonant NEMS has been widely studied for many different applications such as structural mechanics in engineering, ultra sensitive mass spectrometers or the well known Atomic Force Microscope. The study of the eigenfrequencies of such structures is very important, and nowadays there are good theoretical methods to accurately predict such eigenfrequencies. When a little mass is ...
A. Regtmeier, A. Weddemann, I. Ennen, and A. Hütten
Dept. of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
Dept. of Elect. Eng. and Comp. Science, Lab. for Electromagnetic and Electronic Syst., MIT, Cambridge, MA
Institute of Solid State Physics, Vienna University of Technology, Vienna, Austria
Superparamagnetic nanoparticles have a wide range of applications in modern electric devices. Recent developments have identified them as components for a new type of magnetoresistance sensor. We propose a model for the numeric evaluation of the sensor properties. Based on the solutions of the Landau-Lifshitz-Gilbert equation for a set of homogeneously magnetized spheres arranged in highly ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
K. Kavitha, Y. R. Manjoosha, C. S. Sukanya, K. Saranya, K. Chandra Devi, M. Alagappan, A. Gupta
Department of Biomedical Engineering, PSG college of technology, Coimbatore, TamilNadu, India
The biological hair-cell is a modular building block of a rich variety of biological sensors. These sensors are responsive to various mechanical properties like vibration, touch, gravitational forces, etc., especially flow. Using micro and nano-fabrication technology, an engineering equivalent of such sensors have been reported to be fabricated, imitating the structure and transfer function of ...
AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...
S. Sushma, R. Surekha, K. J. Rudhresha, S. Sahu , S. Singh4 , S. L. Pinjare6 ,
 Dept. of ECE, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India.
This poster focuses on the development of a capacitive pressure sensor for condition monitoring applications. One method to measure vibrations is to mount an pressure sensor on the vibrating machinery or object and measure the pressure exerted due to vibrations. Measured pressure level helps to detect any deviations from the normal conditions.
The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)
B.N. Johnson, and R. Mutharasan
Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA
A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that have demonstrated high sensitivity to mass-change in experimentally fabricated sensors. The fundamental bending mode of vibration and the 1st bending harmonic are predicted at 10.0 kHz and 86.8 kHz, respectively, within approximately 5 % of the experimentally measured resonances. The ...
V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...
A. Arpys Arevalo Carreno, E. Byas, I.G. Foulds
King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia
In semiconductor gas sensors, the base of the gas detection is the interaction of the gaseous species at the surface of the semiconducting sensitive material. Since the chemical reactions at the surface of the sensor material are functions of temperature. We simulate our µHeater design on a Buckled Cantilever Plate (BCP). Such structure allows the sensor to be suspended for thermal insulation. ...
University of Kassel, Kassel, Germany
In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...