L. Sujatha, D. K. Balasubramanian, V. S. Selvakumar
Rajalakshmi Engineering College, Chennai, India
University of Central Florida, Orlando, Florida, United States
Micro Mirror is a versatile device which has been gaining popularity and also the importance of MEMS techniques to develop such devices. These mirrors find applications in fields such as optical switching, display and in medical fields for non-invasive imaging. A thermally actuated mirror moves in either vertical or horizontal directions for the given orientation. The ends of thermal actuators ...
S. Heß, R. Külls, and S. Nau
The Fraunhofer Ernst-Mach-Institute (EMI) developed a novel, high-g accelerometer, which is an undamped MEMS device, containing self-supporting piezoresistive elements. The main requirements for such a sensor are high sensitivity, high resonant frequency and a solid mechanical design. Due to the fact, that pure analytic analyses cannot cover all multi-physical aspects of such a complex device ...
BITS Pilani K K BIRLA GOA CAMPUS
The actuator comprises of a temperature sensitive composite deflecting beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes an expansion in the composite beam thereby causing it to deflect. The deflecting beam impinges on the piezoelectric crystal and generating voltage. Response curves for the deflection versus temperature for temperature ranges ...
Multiphysics Modelling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics
R.Yogeswari, S.Venkateshwaran , K.Umapathi
United Institute of Technology,Coimbatore,Tamil Nadu, India
Monitoring the Central aorta is a more effective way to diagnose cardiovascular diseases than conventional techniques. Approximately, six million people in the world are currently living with aortic aneurysm and every year 750,000 new cases are diagnosed. This paper presents the design and simulation of biocompatible Wireless MEMS sensor for detection of intraoperative leaks of the stent graph ...
AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...
N.N. Sharma, and A. Tekawade
Mechanical Engineering Group, Birla Institute of Technology & Science, Pilani, Rajasthan, India
A simple design for a microfluidic flow system for use in mixing or reacting assays with limited sample availability has been proposed and analyzed using COMSOL\'s multiphysics simulation package. The design is based on differential electroosmotic flow concept which has facilitated a number of interesting flow phenomena in micro-domains. For an average potential drop of about 86 kV/m in the ...
S. Druart, D. Flandre, and L.A. Francis
Université catholique de Louvain - ICTEAM, Louvain-la-Neuve, Belgium
In this paper, a methodology to simulate the electric behavior of spiral inductances is presented and discussed. All the methodology is built with the COMSOL software used with the Matlab scripting interface and then allows performing fully parameterized simulations. The program architecture is explained and is used to simulate two applications. The first calculates the voltage induced by an ...
A. Weddemann, J. Jadidian, S. Khushrushahi, Y. Kim, and M. Zahn
Research Laboratory of Electronics
Massachusetts Institute of Technology
The modeling of ferromagnetic materials is a challenging task of high industrial and academic impact. Thin film and granular systems form the basis of novel spintronic devices such as modern hard drives with a high data area storage density. In order to push the current limits even further and to design more efficient devices, a strong understanding of the governing dynamics is required. We ...
Multiphysics Modeling and Simulation of MEMS based Variometer for Detecting the Vertical Speed of Aircraft in Avionics Applications
K. Umapathi, K. Sukirtha, C. Sujitha, K. A. Noushad, Venkateswaran, R. Poornima, R. Yogeswari
United Institute of Technology, Coimbatore, Tamil Nadu, India
Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
The objective of this work is to develop a MEMS based Variometer to measure the vertical speed and to sense the instantaneous rate of climb or descent in Aircrafts to meet the miniaturization requirements in avionics industry. The design consists of dielectric material in between two micro electrodes. The micro diaphragm is placed on one of the electrode. As the aircraft changes altitude, the ...
J. Vijitha, S. S. Priya, K. C. Devi
PSG College of Technology, Coimbatore, Tamil Nadu, India
Sleep apnea is a type of sleep disorder characterized by pauses in breathing or instances of shallow or infrequent breathing during sleep. There is a need to diagnose sleep apnea since it leads to fluctuations in the oxygen level that in turn affect the heart rate and blood pressure. In order to detect this disorder, a Micro Electro Mechanical System (MEMS) based piezoelectric pressure sensor ...