AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...
Optimization of Design Parameters of a Novel MEMS Strain Sensor used for Structural Health Monitoring of Highway Bridges
H. Saboonchi, and D. Ozevin
Civil Engineering Department
University of Illinois at Chicago
The novel Micro Electro Mechanical System (MEMS) based Piezoresistive stain sensor is presented in this paper. The main goal of this sensor is to monitor the localized strain in the highway bridges especially near the crack tips. Monitoring the crack growth on the bridges can lead to early detection and prevention of bridge failures. The COMSOL Multiphysics software was used to optimize the ...
Arpita Das, Amrita Nandy, Sakuntala Mahapatra, Sk. Mohammed Ali, Minu samantary
National MEMS design centre ,Department of Electronics and Telecommunication, Trident Academy of Technology, Biju Pattnaik University of Technology , India
This paper demonstrates the design of a tunable MEMS capacitor with two plates (one movable and one fixed). The response time obtained is 5μs. The tunable capacitor plays an important role in RF circuits. We focus on a tunable capacitor simulated using COMSOL Multiphysics®. In an electrostatically tunable parallel plate capacitor, you can modify the distance between the two plates when the ...
A. Piyadasa[1,3], P. Gao[1,2,3]
Department of Physics, University of Connecticut, Storrs, CT, USA
Department of Materials Science & Engineering, University of Connecticut, Storrs, CT, USA
Institute of Materials Sciences, University of Connecticut, Storrs, CT, USA
3D finite element analysis model has been constructed for testing the directional dependence in a novel form of nanowire array gas flow sensor. Single nanowire (p-type single crystal Silicon) model is developed using fluid structure interaction and piezoresistivity components in the MEMS Module for COMSOL Multiphysics® software. Change in resistivity tensor due to induced stress in the nanowire ...
J. Gozálvez-Zafrilla, and A. Santafé-Moros
Department of Chemical and Nuclear Engineering, Universidad Politécnica de Valencia, Valencia, Spain
The most successful nanofiltration models are those based on the combination of the Extended Nernst-Planck equation with the Donnan steric equilibrium. These models have been typically solved by using iterative procedures based on the Runge-Kutta method. Yet, such procedures present convergence problems in some cases. In this paper, we present an implementation of the original Donnan Steric ...
J. Golebiowski, S. Milcarz
 Department of Semiconductor and Optoelectronics Devices, Technical University of Lodz, Lodz, Poland
The silicon cantilever with the planar coil was applied to the magnetic flux density measurements. The influence of shape and dimensions of planar coil on magnetic energy density was described. In cause of magnetic anisotropy of analyzed silicon structure FEM method and couple field method was applied in simulation. The Lorentz force based sensors owing to their potentially simpler ...
Jawahar Engineering College, Affliated to Anna University, Chennai, Tamil Nadu, India
Microgrippers are typical MEMS devices used to pick, hold and transport micro-objects. Microgrippers are widely used in the field of micro-assembly, micro-surgery and manipulation of micro-particles. Thermal microgrippers are widely used for large displacement, high accuracy and repeatability. In this paper, a hybrid design electrothermal microgripper (Figure 1), based on Poly Methyl ...
S. Elia , G. Granata , P. Lamberti , V. Tucci ,
 University Of Salerno, Italy
Electromagnetic shielding design is usually approached referring to nominal values of the main parameters. This could lead to malfunctioning devices and its performance differ widely from what was really aimed at or, worse, the final design product could even be physically unrealizable. This work presents a robust approach to the design of EM Shielding based on Graphene (Gph) layers. It is a two ...
M. Guizzetti, V. Ferrari, D. Marioli, and T. Zawada
Dept. of Electronics for Automation, University of Brescia, Brescia, Italy
Meggitt, Ferroperm Piezoceramics A/S, Kvistgaard, Denmark
The conversion of mechanical energy from environmental vibrations into electrical energy is a key point for powering sensor nodes toward the development of autonomous sensor systems. Piezoelectric energy converters realized in a cantilever configuration are the most studied for this purpose. In order to improve the performances of the converter, the geometry has to be properly designed. In this ...
Middle East Technical University
In this study, a detailed finite element model coupling the motion dynamics and electromagnetics of a diaphragm based MEMS vibration energy harvester is presented. The energy harvester converts low frequency vibrations to high frequency response by magnetic actuation of a diaphragm carrying coils. AC/DC, Solid Mechanics and Moving Mesh (ALE) modules are coupled together in one 3-D model to ...