Ignition Process of Microplasmas

H. Porteanu, and R. Gesche
Ferdinand-Braun-Institut für Höchstfrequenztechnik, Berlin, Germany

Microplasmas at atmospheric pressure are required in many applications, where treatments in normal ambient, with spatial resolution, are important. The interest on such miniaturized sources has increased due to the availability of a new generation of microwave sources based on high power GaN transistors. The present work deals with a simulation of the plasma formation after the application of the microwave power. The results are needed for the optimization of the GaN oscillator, directly coupled to the plasma source. The slot resonator used in the experiment is simulated by a 2D geometry representing two spatially, infinitely extended, parallel metallic plates. The self consistent calculations are performed using COMSOL Multiphysics.