Application ID: 10185
A scanning electron microscope samples images by scanning a target with a high-energy beam of electrons. The subsequent electron interactions produce signals such as secondary and back-scattered electrons that contain information about the sample surface topography. Electromagnetic lenses are used to focus this electron beam down to a spot about 10 nm wide on the sample surface.
This model requires both the Particle Tracing Module and the AC/DC Module.
This application was built using the following:AC/DC Module Particle Tracing Module
The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product's capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.