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Capacitive Micromotor

Application ID: 17235

This tutorial shows how to model a 2D capacitive micromotor. The motor consists of a rotor and a stator made of polysilicon. The cogs of the stator are subjected to a time-varying pulsed voltage such that the voltage on adjacent cogs vary by a phase difference of 2p/3. As a result, a time-varying torque acts on the rotor thereby rotating it about its center.

This model shows how to use an electrostatics analysis to solve a quasi-static electrical model of the micromotor. An ODE is used to find the angular displacement by setting up the equation of rotary motion. Furthermore, the angular displacement evaluated is used to prescribe the rotation of the mesh on the rotor and in the adjoining air region to account for the transient motion of the micromotor.

This model is included as an example in the following products:

AC/DC Module MEMS Module

The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.