Plasma

User Stories

	Argon Boltzmann Analysis This tutorial model investigates the effects of various parameters on the electron energy distribution function and rate coefficients for an argon discharge.
	Dielectric Barrier Discharge This model simulates electrical breakdown in an atmospheric pressure gas. Because electrical breakdown is a complicated process, a 1D model is considered. To highlight the physics of the breakdown process, the model uses a simple argon...
	GEC ICP Reactor, Argon Chemistry This model investigates the electrical characteristics of the GEC reference cell for argon chemistry.
	Thermal Plasma This model of a high density inductively coupled plasma at 1 torr computes the neutral gas temperature and flow field as well as all the other components which make up the plasma. Gas heating occurs due to quenching of excited Argon atoms.
	3D Model of an ICP Reactor This model investigates 3D effects for an inductively coupled plasma. Asymmetry in the pressure field leads to non-uniform fluxes to the wafer surface.
	Inplane Microwave Plasma This model uses an analytic port to send a plane wave into a reactor containing low pressure Argon. The wave is partially absorbed and reflected by the plasma which sustains the plasma.