Hybrid Modeling of a DC Magnetron Plasma DischargeS.D. Ekpe, F. Jimenez, and S.K. Dew
University of Alberta, Edmonton
This work is focused on the coupling of a Monte Carlo code with COMSOL Multiphysics conduction/convection, and electrostatic modules in solving fluid-Poisson model for the plasma properties for a practical DC magnetron low pressure plasma discharge.
The magnetostatic module was used in calculating the required magnetic field.
- Ekpe.pdf - 1.85MB