A study of nonlinear deflection dynamics of a piezoelectric accelerometerKaya, T., Koser, H.
This work focuses on the study of large amplitude, nonlinear deflection dynamics of a piezoelectric accelerometer and aims to determine the material and geometry limitations on the structural integrity of the device.
FEMLAB’s multiphysics capabilities are used throughout this FEA study to understand the relationship of the geometry and materials to the resonance modes, large deflection dynamics of the tethers and the corresponding displacement-stress relationships.
The presence of the piezoelectric thin film on certain sections of the tethers changes the dynamics somewhat and reduces the maximum stress that the tether bases can be subjected to, owing to the fact that the fracture stress of lead-zirconium-titanate (PZT) films are typically an order of magnitude less than that of single crystal silicon.
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